The decomposition of the residual laser beam jitter into its contributions was achieved with a hybrid approach which made use of both parametric and model-based approaches. The best method to separate the component of the residual laser beam jitter due to external disturbances from the effect due to internal noise caused, directly or indirectly, by the control elements themselves were identified from validation testing of the most popular and innovative techniques used in the field of acoustics and vibration. Sound Answers has investigated both statistical (black/gray box) and physical signal decomposition techniques. The statistical techniques that were investigated included, and were not limited to: Independent Component Analysis (Blind Source Separation), Principal Component Analysis, Partial Singular Value Decomposition, Conditioned Input Analysis (Partial Coherence). Pattern recognition techniques such as Wavelets and Empirical Mode Decomposition were also evaluated. Finally, Sound Answers has combined these techniques with physical characterization of the system in terms of sources (or loads, such as the input jitter) and paths (or system sensitivities, such as the transfer functions of the individual sensors, or sensor mounting systems or control actuator modules). BENEFIT: The set of signal processing algorithms utilized for the decomposition of the contributions to the residual jitter will be integrated in a Residual Jitter Decomposition toolbox which can be sold to HEL manufacturers and/or Beam Stabilization and Control System providers.